半導体CV特性測定器 TECHMIZE 型式:TH511【国内正規品】
販売価格(税抜):¥2,880,000
■製品仕様:
Ciss、 Coss、 Crss、 Rg、 スポット・テスト、
リスト・スキャン、 テスト周波数: 1kHz-2MHz、
VGS: ±40V、 VDS: ±200V、 2チャンネル
製品詳細
■アプリケーション
• 半導体コンポーネント/電力コンポーネント
ダイオード、トライオード、MOSFET、IGBT、サイリスタ、統合回路、光電子チップなどの寄生容量テストおよびC-V特性分析
• 半導体材料
ウェハー、C-V特性分析
• 液晶材料
弾性定数分析
• 電気容量要素
コンデンサC-V特性テストおよび分析、電気容量センサーテストおよび分析
Specifications
Model | TH511 | TH512 | TH513 | ||||
Channel | 2 (4/6 Ch Optional) | 2 | |||||
Display | Display | 10.1-inch capacitive touchscreen | |||||
Ratio | 0.672916667 | ||||||
Resolution | 1280*RGB*800 | ||||||
Test Parameter | Ciss, Coss, Crss, Rg. Four parameter selectable arbitrarily | ||||||
Test Frequency | Range | 1kHz-2MHz | |||||
Accuracy | 0.0001 | ||||||
Resolution | 10mHz 1.00000kHz-9.99999kHz | ||||||
100mHz 10.0000kHz-99.9999kHz | |||||||
1Hz 100.000kHz-999.999kHz | |||||||
10Hz 1.00000MHz-2.00000MHz | |||||||
Test Level | Voltage Range | 5mVrms-2Vrms | |||||
Accuracy | ± (10%*Setting Value+2mV) | ||||||
Resolution | 1mVrms 5mVrms-1Vrms | ||||||
10mVrms 1Vrms-2Vrms | |||||||
Vgs | Range | 0 – ±40V | |||||
Accuracy | 1%* Setting Voltage+8mV | ||||||
Resolution | 1mV 0V – ±10V | ||||||
10mV ±10V – ±40V | |||||||
Vds | Range | 0 – 200V | 0 – 1500V | 0 – 3000V | |||
Accuracy | 1%* Setting Voltage+100mV | ||||||
Output Impedance | 100Ω, ±2%@1kHz | ||||||
Computation | Absolute deviation Δ from nominal value, percent deviation from nominal value Δ% | ||||||
Calibration Function | OPEN, SHORT, LOAD | ||||||
Measure Average | 1-255 times | ||||||
AD Conversion Time (ms/time) | Fast+: 0.56ms (>5kHz), Fast: 3.3ms, Middle: 90ms, Slow: 220ms. | ||||||
Basic Accuracy | 0.001 | ||||||
Ciss, Coss, Crss | 0.00001pF – 9.99999F | ||||||
Rg | 0.001mΩ – 99.9999MΩ | ||||||
Δ% | ±(0.000% – 999.9%) | ||||||
Multi-Function Parameter List Scan | Spots | 20 spots, the average number can be set for each spot, and each spot can be sorted separately | |||||
Parameter | Test Frequency, Vg, Vd, Channel | ||||||
Trigger Mode | Sequence SEQ: After one trigger, measure at all sweep points, /EOM/INDEX output only once. Step: perform a sweep point measurement per trigger, each point outputs /EOM/INDEX, but the list scan comparator result is only output at the last /EOM |
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Graphic Scan | Scanning Spots | Any Spot is optional, up to 1001 Spots | |||||
Result Display | Multiple curves with the same parameter and different Vg; multiple curves with the same Vg and different parameters. |
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Display Range | Real-time automatic, locked | ||||||
Coordinate ruler | Logarithmic, linear | ||||||
Parameter | Vg, Vd | ||||||
Trigger Mode | Single | Manual trigger once, complete one scan from the start spot to the end spot, and start a new scan with the next trigger signal | |||||
Continuous | Infinite loop scan from the start spot to the end spot | ||||||
Result Storage | Graphics, files | ||||||
Comparators | Bin | 10Bin, PASS, FAIL | |||||
Bin Deviation Setting | Deviation, Percent Deviation, Off | ||||||
Bin Mode | Tolerance, continuous | ||||||
Bin Count | 0-99999 | ||||||
Bin Judgement | A maximum of four parameter limit ranges can be set for each bin. The corresponding bin number will be displayed within the setting range of the four test parameter results. If it exceeds the set maximum bin number range, FAIL will be displayed. Test parameters without upper and lower limits will be automatically ignored. | ||||||
PASS/FAIL indication | Satisfy Bin1-10, the PASS light on the front panel is on, otherwise the FAIL light is on. | ||||||
Data Storage | 201 measurement results can be read in batches | ||||||
Storage File | Internal | About 100M non-volatile memory test setup file | |||||
External USB | Test setup files, screenshots, log files | ||||||
Keyboard Lock | Lockable front panel buttons, other functions to be expanded | ||||||
Interface | USB HOST | 2 USB HOST interfaces, which can be connected to the mouse and keyboard at the same time, and only one U disk can be used at the same time | |||||
USB DEVICE | Universal Serial Bus socket, small type B (4 contact positions); compliant with USB TMC-USB488 and USB2.0, female connector for connecting external controllers. | ||||||
LAN | 10/100M Ethernet, 8 pins, two speed options | ||||||
HANDLER | Used for Bin signal output | ||||||
RS232C | Standard 9-pin, crossed | ||||||
RS485 | Can receive modification or external RS232 to RS485 module | ||||||
Boot Warm-up Time | 60 Minutes | ||||||
Input voltage | 100-120VAC/198-242VAC Option, 47-63Hz | ||||||
Power consumption | More than 130VA | ||||||
Dimensions (W*H*D) mm | 430*177*405 | ||||||
Weight | 12kg |
Accessary
Standard | ||||||
Accessories name | Model | |||||
Test Fixture | TH26063B | |||||
Test Fixture | TH26063C | |||||
TH510 fixture control connection cable | TH26063D | |||||
TH510 Test Extension Cable | TH26063G |
Downloads
Specification of TH510 series 2023.08.pdf | Download |
TH510 Series English Manual.pdf | Download |